JPS6123011Y2 - - Google Patents

Info

Publication number
JPS6123011Y2
JPS6123011Y2 JP1981133745U JP13374581U JPS6123011Y2 JP S6123011 Y2 JPS6123011 Y2 JP S6123011Y2 JP 1981133745 U JP1981133745 U JP 1981133745U JP 13374581 U JP13374581 U JP 13374581U JP S6123011 Y2 JPS6123011 Y2 JP S6123011Y2
Authority
JP
Japan
Prior art keywords
chamber
reaction
electrodes
thin film
small
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981133745U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5838783U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13374581U priority Critical patent/JPS5838783U/ja
Publication of JPS5838783U publication Critical patent/JPS5838783U/ja
Application granted granted Critical
Publication of JPS6123011Y2 publication Critical patent/JPS6123011Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP13374581U 1981-09-09 1981-09-09 量産型薄膜製造装置 Granted JPS5838783U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13374581U JPS5838783U (ja) 1981-09-09 1981-09-09 量産型薄膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13374581U JPS5838783U (ja) 1981-09-09 1981-09-09 量産型薄膜製造装置

Publications (2)

Publication Number Publication Date
JPS5838783U JPS5838783U (ja) 1983-03-14
JPS6123011Y2 true JPS6123011Y2 (en]) 1986-07-10

Family

ID=29927192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13374581U Granted JPS5838783U (ja) 1981-09-09 1981-09-09 量産型薄膜製造装置

Country Status (1)

Country Link
JP (1) JPS5838783U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029295B2 (ja) * 1979-08-16 1985-07-10 舜平 山崎 非単結晶被膜形成法

Also Published As

Publication number Publication date
JPS5838783U (ja) 1983-03-14

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